Compressed CO2 is employed as the solvent for the deposition of polymers onto patterned surfaces created by a lithographic technique. This deposition technique should have wide applicability in the deposition of organic and polymeric materials for optoelectronic devices. The advantage of controlled deposition confers a further benefit in the control of the patterned surface. In a specific example a perfluorinated polymer was dissolved in liquid carbon dioxide. The polymer solution was deposited by use of a nozzle onto a pre-patterned surface. The resulting polymer film showed a clear image of the original pattern as measured by optical microscopy.
|Number of pages||6|
|Journal||Materials Research Society Symposium - Proceedings|
|Publication status||Published - 30 Jun 2003|
|Event||Polymer/Metal Interfaces and Defect Mediated Phenomena in Ordered Polymers - Boston, MA, United States|
Duration: 2 Dec 2002 → 6 Dec 2002
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials