Overcoming material challenges for replication of Motheye Lenses using step and flash imprint lithography (S-FIL) for opto-electronic applications

J Kettle, RT Hoyle, RM Perks, Stefan Dimov

Research output: Contribution to journalArticle

12 Citations (Scopus)
Original languageEnglish
Pages (from-to)1794-1799
Number of pages6
JournalJournal of Vacuum Science and Technology. Part B. Nanotechnology & Microelectronics
Issue number5
Publication statusPublished - 1 Jan 2008

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