Optimized SU-8 UV-lithographical process for a Ka-band filter fabrication

P Jin; Kyle Jiang; JB Tan; Michael Lancaster

Optimized SU-8 UV-lithographical process for a Ka-band filter fabrication

P Jin, Kyle Jiang, JB Tan, Michael Lancaster

Research output: Contribution to conference (unpublished) › Paper

Original language	English
Pages	352-356
Number of pages	5
Publication status	Published - 25 Nov 2005
Event	SPIE Proceedings of the 3rd International Conference on Experimental Mechanics and 3rd Conference of the Asian Committee on Experimental Mechanics, Part 1 & 2 - Duration: 25 Nov 2005 → …

Conference

Conference	SPIE Proceedings of the 3rd International Conference on Experimental Mechanics and 3rd Conference of the Asian Committee on Experimental Mechanics, Part 1 & 2
Period	25/11/05 → …

Cite this

@conference{e105074996f2493d8b33364200da5993,

title = "Optimized SU-8 UV-lithographical process for a Ka-band filter fabrication",

author = "P Jin and Kyle Jiang and JB Tan and Michael Lancaster",

year = "2005",

month = nov,

day = "25",

language = "English",

pages = "352--356",

note = "SPIE Proceedings of the 3rd International Conference on Experimental Mechanics and 3rd Conference of the Asian Committee on Experimental Mechanics, Part 1 & 2 ; Conference date: 25-11-2005",

}

Optimized SU-8 UV-lithographical process for a Ka-band filter fabrication. / Jin, P; Jiang, Kyle; Tan, JB et al.
2005. 352-356 Paper presented at SPIE Proceedings of the 3rd International Conference on Experimental Mechanics and 3rd Conference of the Asian Committee on Experimental Mechanics, Part 1 & 2.

Research output: Contribution to conference (unpublished) › Paper

TY - CONF

T1 - Optimized SU-8 UV-lithographical process for a Ka-band filter fabrication

AU - Jin, P

AU - Jiang, Kyle

AU - Tan, JB

AU - Lancaster, Michael

PY - 2005/11/25

Y1 - 2005/11/25

M3 - Paper

SP - 352

EP - 356

T2 - SPIE Proceedings of the 3rd International Conference on Experimental Mechanics and 3rd Conference of the Asian Committee on Experimental Mechanics, Part 1 & 2

Y2 - 25 November 2005

ER -