Optical Emmision Spectroscopy and Langmuir Probe Characterisation of the Plasma During High-Pressure Sputter Deposition of High-Tc Superconducting YBa2Cu307-x Thin Films

VN Tsaneva; TSV Popov; FM Dias; Edward Tarte; MG Blamire; JE Evetts; ZH Barber

doi:10.1016/S0042-207X(02)00342-1

Optical Emmision Spectroscopy and Langmuir Probe Characterisation of the Plasma During High-Pressure Sputter Deposition of High-Tc Superconducting YBa2Cu307-x Thin Films

VN Tsaneva, TSV Popov, FM Dias, Edward Tarte, MG Blamire, JE Evetts, ZH Barber

Electronic, Electrical and Systems Engineering

Research output: Contribution to conference (unpublished) › Paper

5 Citations (Scopus)

Original language	English
Pages	261-266
Number of pages	6
DOIs	https://doi.org/10.1016/S0042-207X(02)00342-1
Publication status	Published - 24 Dec 2002

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10.1016/S0042-207X(02)00342-1

Cite this

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title = "Optical Emmision Spectroscopy and Langmuir Probe Characterisation of the Plasma During High-Pressure Sputter Deposition of High-Tc Superconducting YBa2Cu307-x Thin Films",

author = "VN Tsaneva and TSV Popov and FM Dias and Edward Tarte and MG Blamire and JE Evetts and ZH Barber",

year = "2002",

month = dec,

day = "24",

doi = "10.1016/S0042-207X(02)00342-1",

language = "English",

pages = "261--266",

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AU - Tsaneva, VN

AU - Popov, TSV

AU - Dias, FM

AU - Tarte, Edward

AU - Blamire, MG

AU - Evetts, JE

AU - Barber, ZH

PY - 2002/12/24

Y1 - 2002/12/24

U2 - 10.1016/S0042-207X(02)00342-1

DO - 10.1016/S0042-207X(02)00342-1

M3 - Paper

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EP - 266

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