Optical Emmision Spectroscopy and Langmuir Probe Characterisation of the Plasma During High-Pressure Sputter Deposition of High-Tc Superconducting YBa2Cu307-x Thin Films

VN Tsaneva, TSV Popov, FM Dias, Edward Tarte, MG Blamire, JE Evetts, ZH Barber

Research output: Contribution to conference (unpublished)Paper

5 Citations (Scopus)
Original languageEnglish
Number of pages6
Publication statusPublished - 24 Dec 2002

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