| Original language | English |
|---|---|
| Title of host publication | 4m/Icomm 2009 - The Global Conference On Micro Manufacture, 1/01/09 |
| Publication status | Published - 1 Jan 2009 |
Novel process chain for fabrication of Ni shims
VL Velkova, GM Lalev, H Hirshy, SG Scholz, Stefan Dimov
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution