Keyphrases
Manufacturing Routes
100%
Process Chain
100%
Technology Devices
100%
Scale-up Production
100%
Terahertz Technology
100%
Terahertz Waveguide
75%
Waveguide
50%
Surface Integrity
50%
Functional Traits
50%
Waveguide Components
50%
Functional Structure
50%
Geometric Accuracy
50%
Waveguide Devices
50%
Photoresist
25%
Surface Roughness
25%
Laser Machining
25%
Sidewall
25%
Meso
25%
Device Performance
25%
Laser Micromachining
25%
Sufficient Evidence
25%
Manufacturing Methods
25%
Taper Angle
25%
Serial Production
25%
Filter Performance
25%
Manufacturing Efficiency
25%
Operating Frequency
25%
Waveguide Structure
25%
Functional Surface
25%
Manufacturing Process Chains
25%
Hybrid Manufacturing
25%
Waveguide Filter
25%
Promising Solutions
25%
Computer numerical Control
25%
Manufacturing Capability
25%
Corner Radius
25%
Waveguide Cavity
25%
Technological Requirements
25%
Waveguide Fabrication
25%
Manufacturing Constraints
25%
Terahertz Components
25%
Angle Deviation
25%
Miniaturized Components
25%
Engineering
Waveguide
100%
Terahertz
100%
Process Chain
50%
Surface Integrity
20%
Microscale
10%
Photoresist
10%
Experimental Result
10%
Side Wall
10%
Device Performance
10%
Manufacturing Process
10%
Computer Numerical Control
10%
Manufacturing Technique
10%
Taper Angle
10%
Feasibility Study
10%
Micro Machining
10%
Mesoscale
10%
Operating Frequency
10%
Laser Micro
10%
Corner Radius
10%
Material Science
Waveguide
100%
Surface (Surface Science)
20%
Machining
20%
Surface Roughness
10%
Laser Beam Machining
10%
Physics
Waveguide
100%
Waveguide Filters
11%
Surface Roughness
11%
Numerical Control
11%
Laser Machining
11%