Original language | English |
---|---|
Pages (from-to) | 166-173 |
Number of pages | 8 |
Journal | Thin Solid Films |
Volume | 433 |
Issue number | 1-2 |
DOIs | |
Publication status | Published - 2 Jun 2003 |
Nanoscaled composite TiN/Cu multilayer thin films deposited by dual ion beam sputtering: growth and structural characterisation
G Abadias, Yau Tse, A Michel, C Jaouen, M Jaouen
Research output: Contribution to journal › Article
34
Citations
(Scopus)