Nano planar coil actuated micro paddle resonator for mass detection

SC Charandabi; Philip Prewett; CA Hamlett; Carl Anthony; Jon Preece

doi:10.1016/j.mee.2011.02.086

Nano planar coil actuated micro paddle resonator for mass detection

SC Charandabi, Philip Prewett, CA Hamlett, Carl Anthony, Jon Preece

Research output: Contribution to journal › Article

6 Citations (Scopus)

Abstract

A torsional paddle microresonator has been conceived, designed and fabricated to first prototype level. It has demonstrated mass sensitivity that gives the potential for the detection of a range of biowarfare agents ranging from bacterial and other pathogens to the VOCs associated with explosives. This current work reports progress towards the implementation of a Lorentz force electromagnetic actuation system for the resonator, in place of the previously used piezoelectric shaker. A double planar spiral microcoil has been designed to be integrated with the micropaddle and has been prototyped using focused ion beam processing. Its mechanical effect upon the performance of the paddle has been investigated and its electromagnetic characteristics simulated using FEA. The coil self inductance was calculated to be 1.54 x 10(-10) H. (C) 2011 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	2229-2232
Number of pages	4
Journal	Microelectronic Engineering
Volume	88
Issue number	8
DOIs	https://doi.org/10.1016/j.mee.2011.02.086
Publication status	Published - 1 Aug 2011

Keywords

Mass detection
Micro-nano fabrication
Electromagnetic actuation
Micro paddle resonator

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10.1016/j.mee.2011.02.086

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title = "Nano planar coil actuated micro paddle resonator for mass detection",

abstract = "A torsional paddle microresonator has been conceived, designed and fabricated to first prototype level. It has demonstrated mass sensitivity that gives the potential for the detection of a range of biowarfare agents ranging from bacterial and other pathogens to the VOCs associated with explosives. This current work reports progress towards the implementation of a Lorentz force electromagnetic actuation system for the resonator, in place of the previously used piezoelectric shaker. A double planar spiral microcoil has been designed to be integrated with the micropaddle and has been prototyped using focused ion beam processing. Its mechanical effect upon the performance of the paddle has been investigated and its electromagnetic characteristics simulated using FEA. The coil self inductance was calculated to be 1.54 x 10(-10) H. (C) 2011 Elsevier B.V. All rights reserved.",

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author = "SC Charandabi and Philip Prewett and CA Hamlett and Carl Anthony and Jon Preece",

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T1 - Nano planar coil actuated micro paddle resonator for mass detection

AU - Charandabi, SC

AU - Prewett, Philip

AU - Hamlett, CA

AU - Anthony, Carl

AU - Preece, Jon

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AB - A torsional paddle microresonator has been conceived, designed and fabricated to first prototype level. It has demonstrated mass sensitivity that gives the potential for the detection of a range of biowarfare agents ranging from bacterial and other pathogens to the VOCs associated with explosives. This current work reports progress towards the implementation of a Lorentz force electromagnetic actuation system for the resonator, in place of the previously used piezoelectric shaker. A double planar spiral microcoil has been designed to be integrated with the micropaddle and has been prototyped using focused ion beam processing. Its mechanical effect upon the performance of the paddle has been investigated and its electromagnetic characteristics simulated using FEA. The coil self inductance was calculated to be 1.54 x 10(-10) H. (C) 2011 Elsevier B.V. All rights reserved.

KW - Mass detection

KW - Micro-nano fabrication

KW - Electromagnetic actuation

KW - Micro paddle resonator

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DO - 10.1016/j.mee.2011.02.086

M3 - Article

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VL - 88

SP - 2229

EP - 2232

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 8

ER -

Nano planar coil actuated micro paddle resonator for mass detection

Abstract

Keywords

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