Multi-trigger resist for electron beam lithography
- Dimitrios Kazazis
- , Wolfgang Theis
- , Alex P. Robinson
- , Carmen Popescu
- , Alex Mcclelland
- , Guy Dawson
- , John Roth
- , Yasin Ekinci
- , Uwe F.w. Behringer (Editor)
- , Jo Finders (Editor)
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
3
Citations
(Scopus)