Multi-trigger resist for electron beam lithography

  • Dimitrios Kazazis
  • , Wolfgang Theis
  • , Alex P. Robinson
  • , Carmen Popescu
  • , Alex Mcclelland
  • , Guy Dawson
  • , John Roth
  • , Yasin Ekinci
  • , Uwe F.w. Behringer (Editor)
  • , Jo Finders (Editor)

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

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