Morphological characterization of sub-micron PDMS bowl structures

Ali Mohammadkhani; Hossein Ostadi; Kyle Jiang

doi:10.1109/NANO.2012.6321998

Morphological characterization of sub-micron PDMS bowl structures

Ali Mohammadkhani^*, Hossein Ostadi, Kyle Jiang

^*Corresponding author for this work

Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this study, both SEM stereoscopic technique and FIB milling method are used to characterize the morphology of PDMS bowl-shaped structure. The presented structure is created via a low-cost and high-throughput modified colloidal lithographic method. 3D reconstruction through SEM stereoscopic images is used to perform volume analysis while FIB milling is used to perform cross-sectional analysis. The results show that the average value of maximum peak to valley distance is 516 nm and the average height of the pyramids is around 325 nm. This approach provides a simple and efficient way to measure the morphological parameters in nanometer-sized structures.

Original language	English
Title of host publication	2012 12th IEEE International Conference on Nanotechnology, NANO 2012
DOIs	https://doi.org/10.1109/NANO.2012.6321998
Publication status	Published - 22 Nov 2012
Event	2012 12th IEEE International Conference on Nanotechnology, NANO 2012 - Birmingham, United Kingdom Duration: 20 Aug 2012 → 23 Aug 2012

Conference

Conference	2012 12th IEEE International Conference on Nanotechnology, NANO 2012
Country/Territory	United Kingdom
City	Birmingham
Period	20/08/12 → 23/08/12

ASJC Scopus subject areas

Bioengineering
Electrical and Electronic Engineering
Materials Chemistry
Condensed Matter Physics

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10.1109/NANO.2012.6321998

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@inproceedings{311e1960946045c1bc3829d7f9478738,

title = "Morphological characterization of sub-micron PDMS bowl structures",

abstract = "In this study, both SEM stereoscopic technique and FIB milling method are used to characterize the morphology of PDMS bowl-shaped structure. The presented structure is created via a low-cost and high-throughput modified colloidal lithographic method. 3D reconstruction through SEM stereoscopic images is used to perform volume analysis while FIB milling is used to perform cross-sectional analysis. The results show that the average value of maximum peak to valley distance is 516 nm and the average height of the pyramids is around 325 nm. This approach provides a simple and efficient way to measure the morphological parameters in nanometer-sized structures.",

author = "Ali Mohammadkhani and Hossein Ostadi and Kyle Jiang",

year = "2012",

month = nov,

day = "22",

doi = "10.1109/NANO.2012.6321998",

language = "English",

isbn = "9781467321983",

booktitle = "2012 12th IEEE International Conference on Nanotechnology, NANO 2012",

note = "2012 12th IEEE International Conference on Nanotechnology, NANO 2012 ; Conference date: 20-08-2012 Through 23-08-2012",

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TY - GEN

T1 - Morphological characterization of sub-micron PDMS bowl structures

AU - Mohammadkhani, Ali

AU - Ostadi, Hossein

AU - Jiang, Kyle

PY - 2012/11/22

Y1 - 2012/11/22

N2 - In this study, both SEM stereoscopic technique and FIB milling method are used to characterize the morphology of PDMS bowl-shaped structure. The presented structure is created via a low-cost and high-throughput modified colloidal lithographic method. 3D reconstruction through SEM stereoscopic images is used to perform volume analysis while FIB milling is used to perform cross-sectional analysis. The results show that the average value of maximum peak to valley distance is 516 nm and the average height of the pyramids is around 325 nm. This approach provides a simple and efficient way to measure the morphological parameters in nanometer-sized structures.

AB - In this study, both SEM stereoscopic technique and FIB milling method are used to characterize the morphology of PDMS bowl-shaped structure. The presented structure is created via a low-cost and high-throughput modified colloidal lithographic method. 3D reconstruction through SEM stereoscopic images is used to perform volume analysis while FIB milling is used to perform cross-sectional analysis. The results show that the average value of maximum peak to valley distance is 516 nm and the average height of the pyramids is around 325 nm. This approach provides a simple and efficient way to measure the morphological parameters in nanometer-sized structures.

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U2 - 10.1109/NANO.2012.6321998

DO - 10.1109/NANO.2012.6321998

M3 - Conference contribution

AN - SCOPUS:84869162785

SN - 9781467321983

BT - 2012 12th IEEE International Conference on Nanotechnology, NANO 2012

T2 - 2012 12th IEEE International Conference on Nanotechnology, NANO 2012

Y2 - 20 August 2012 through 23 August 2012

ER -

Morphological characterization of sub-micron PDMS bowl structures

Abstract

Conference

ASJC Scopus subject areas

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