Micropatterning of 3D ceramic microstructures

We report a method which combines colloidal processing with polymer mould for the net shape fabrication of fine scale ceramic structures with feature sizes in the micrometer range and aspect ratios up to 10. Both soft and solid polymer moulds have been used, which can be made using lithography, laser micromachining or CNC machining. Fine scale ceramic structures are formed via embossing, moulding and casting. Polymer moulds are removed using either chemical or mechanical methods depending on the aspect ratio and feature size of the fine scale ceramic structures. Some fine scale ceramic structures have been demonstrated in examples such as PZT microrod arrays and alumina microgears. (C) 2002 Kluwer Academic Publishers.