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Presented is a micromachined WR-3 waveguide filter with two embedded H-plane back-to-back bends fabricated using thick SU-8 photoresist micromachining technology. The filter was constructed with four silver-coated SU-8 layers with a thickness of 0.432 mm for each layer. These layers were then bonded on top of each other to form the filter. This layered WR-3 waveguide filter with bends exhibited a minimum insertion loss of 3.3 dB and an 8.8% 3 dB fractional bandwidth at a central frequency of 293.2 GHz. The measured return loss is better than 16 dB across the whole passband.
|Number of pages||3|
|Publication status||Published - 1 Apr 2011|
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- 1 Finished
Terahertz Micromachined Resonator Superstructures
Lancaster, M., Gardner, P. & Huang, F.
Engineering & Physical Science Research Council
1/06/10 → 30/11/13
Project: Research Councils