Micromachined rectangular coaxial line and cavity resonator for 77GH z applications using SU8 Photoresist

Maolong Ke*, Yi Wang, Kyle Jiang, Michael J. Lancaster

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

Thick SU8 photoresist technique is used to fabricate two millimetre-wave components. Firstly, an air-filled rectangular coaxial line operating from 55 to 87 GHz is fabricated and tested, and an insertion loss of 0.8dB and return loss of better than-15dB was obtained. The overall measured responses agree well with full-wave simulation results. Secondly, a cavity resonator operating at 77GHz is reported. An unloaded Q value of 569 was obtained, which is, to our knowledge, one of the best reported so far in a similar structure.

Original languageEnglish
Title of host publicationProceedings of 2008 Asia Pacific Microwave Conference, APMC 2008
DOIs
Publication statusPublished - 1 Dec 2008
Event2008 Asia Pacific Microwave Conference, APMC 2008 - Hong Kong, China
Duration: 16 Dec 200820 Dec 2008

Conference

Conference2008 Asia Pacific Microwave Conference, APMC 2008
Country/TerritoryChina
CityHong Kong
Period16/12/0820/12/08

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Hardware and Architecture
  • Electrical and Electronic Engineering

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