Abstract
A precision micro-fabrication technique has been developed for millimetre-wave components of air-filled three-dimensional structures, such as rectangular coaxial lines or waveguides. The devices are formed by bonding several layers of micromachining defined slices with a thickness of a few hundred micrometres. The slices are thickphotoresist SU8 defined by photolithography, or silicon with a pattern defined by deep reactive ion etching; both are coated with gold by evaporation. The process is simple, and low-cost, as compared with conventional precision metal machining, but yields mm-wave components with good performance. The components are light weight and truly airfilled with no dielectric support. This paper reviews several of these micromachined mm-wave components at 38 and 77 GHz for communications and radar applications.
| Original language | English |
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| Publication status | Published - 1 May 2009 |
| Event | 5th ESA Workshop on Millimetre Wave Technology and Applications and 31st Antenna Workshop - Duration: 1 May 2009 → … |
Conference
| Conference | 5th ESA Workshop on Millimetre Wave Technology and Applications and 31st Antenna Workshop |
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| Period | 1/05/09 → … |