Micromachined 300-GHz SU-8-Based Slotted Waveguide Antenna

Yi Wang; Mao Ke; Michael Lancaster; J Chen

Micromachined 300-GHz SU-8-Based Slotted Waveguide Antenna

Yi Wang
, Mao Ke
, Michael Lancaster
, J Chen

Electronic, Electrical and Systems Engineering

Research output: Contribution to journal › Letter

36 Citations (Scopus)

Abstract

A micromachined 300-GHz slotted waveguide antenna is demonstrated using a simple fabrication technique based on metal-coated SU-8 thick resist. The antenna is designed to be built from a four-layer structure of equal layer thickness. It is fully characterized, and the measured radiation patterns show excellent agreement with the simulation. An H-plane matched right-angle bend is integrated in the antenna in order to achieve reliable and accurate connection with standard waveguide flange. The micromachined antenna is directional and low-profile and may find applications in low-cost sensors and radars.

Original language	English
Pages (from-to)	573
Number of pages	1
Journal	IEEE Antennas and Wireless Propagation Letters
Volume	10
Publication status	Published - 1 Jan 2011

Cite this

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title = "Micromachined 300-GHz SU-8-Based Slotted Waveguide Antenna",

abstract = "A micromachined 300-GHz slotted waveguide antenna is demonstrated using a simple fabrication technique based on metal-coated SU-8 thick resist. The antenna is designed to be built from a four-layer structure of equal layer thickness. It is fully characterized, and the measured radiation patterns show excellent agreement with the simulation. An H-plane matched right-angle bend is integrated in the antenna in order to achieve reliable and accurate connection with standard waveguide flange. The micromachined antenna is directional and low-profile and may find applications in low-cost sensors and radars.",

author = "Yi Wang and Mao Ke and Michael Lancaster and J Chen",

year = "2011",

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day = "1",

language = "English",

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journal = "IEEE Antennas and Wireless Propagation Letters",

issn = "1548-5757",

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AU - Wang, Yi

AU - Ke, Mao

AU - Lancaster, Michael

AU - Chen, J

PY - 2011/1/1

Y1 - 2011/1/1

N2 - A micromachined 300-GHz slotted waveguide antenna is demonstrated using a simple fabrication technique based on metal-coated SU-8 thick resist. The antenna is designed to be built from a four-layer structure of equal layer thickness. It is fully characterized, and the measured radiation patterns show excellent agreement with the simulation. An H-plane matched right-angle bend is integrated in the antenna in order to achieve reliable and accurate connection with standard waveguide flange. The micromachined antenna is directional and low-profile and may find applications in low-cost sensors and radars.

AB - A micromachined 300-GHz slotted waveguide antenna is demonstrated using a simple fabrication technique based on metal-coated SU-8 thick resist. The antenna is designed to be built from a four-layer structure of equal layer thickness. It is fully characterized, and the measured radiation patterns show excellent agreement with the simulation. An H-plane matched right-angle bend is integrated in the antenna in order to achieve reliable and accurate connection with standard waveguide flange. The micromachined antenna is directional and low-profile and may find applications in low-cost sensors and radars.

M3 - Letter

SN - 1548-5757

VL - 10

SP - 573

JO - IEEE Antennas and Wireless Propagation Letters

JF - IEEE Antennas and Wireless Propagation Letters

ER -

Micromachined 300-GHz SU-8-Based Slotted Waveguide Antenna

Abstract

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