Micromachined 300-GHz SU-8-Based Slotted Waveguide Antenna

Yi Wang, Mao Ke, Michael Lancaster, J Chen

Research output: Contribution to journalLetter

36 Citations (Scopus)


A micromachined 300-GHz slotted waveguide antenna is demonstrated using a simple fabrication technique based on metal-coated SU-8 thick resist. The antenna is designed to be built from a four-layer structure of equal layer thickness. It is fully characterized, and the measured radiation patterns show excellent agreement with the simulation. An H-plane matched right-angle bend is integrated in the antenna in order to achieve reliable and accurate connection with standard waveguide flange. The micromachined antenna is directional and low-profile and may find applications in low-cost sensors and radars.
Original languageEnglish
Pages (from-to)573
Number of pages1
JournalIEEE Antennas and Wireless Propagation Letters
Publication statusPublished - 1 Jan 2011


Dive into the research topics of 'Micromachined 300-GHz SU-8-Based Slotted Waveguide Antenna'. Together they form a unique fingerprint.

Cite this