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Microfabrication of ultra-thick SU-8 photoresist for microengines

Research output: Contribution to conference (unpublished)Paper

Original languageEnglish
Publication statusPublished - 1 Jan 2003
EventPhotowest Micromachining & Microfabrication 2003 -
Duration: 1 Jan 2003 → …

Conference

ConferencePhotowest Micromachining & Microfabrication 2003
Period1/01/03 → …

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