Microfabrication of three-dimensional, free-standing ceramic MEMS components by soft molding

Research output: Contribution to journal › Article

21 Citations (Scopus)

Original language	English
Pages (from-to)	924-927
Number of pages	4
Journal	Advanced Engineering Materials
Volume	5
Issue number	12
DOIs	https://doi.org/10.1002/adem.200300518
Publication status	Published - 30 Dec 2003

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@article{b27ea3619d474b64ab24e369183d699a,

title = "Microfabrication of three-dimensional, free-standing ceramic MEMS components by soft molding",

author = "Dou Zhang and Bo Su and Timothy Button",

year = "2003",

month = dec,

day = "30",

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language = "English",

volume = "5",

pages = "924--927",

journal = "Advanced Engineering Materials",

issn = "1527-2648",

publisher = "Wiley-VCH Verlag",

number = "12",

}

TY - JOUR

T1 - Microfabrication of three-dimensional, free-standing ceramic MEMS components by soft molding

AU - Zhang, Dou

AU - Su, Bo

AU - Button, Timothy

PY - 2003/12/30

Y1 - 2003/12/30

UR - https://www.scopus.com/pages/publications/1342283891

U2 - 10.1002/adem.200300518

DO - 10.1002/adem.200300518

M3 - Article

SN - 1527-2648

VL - 5

SP - 924

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JO - Advanced Engineering Materials

JF - Advanced Engineering Materials

IS - 12

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