Microfabrication of three-dimensional, free-standing ceramic MEMS components by soft molding

Dou Zhang, Bo Su, Timothy Button

Research output: Contribution to journal › Article

21 Citations (Scopus)

Original language	English
Pages (from-to)	924-927
Number of pages	4
Journal	Advanced Engineering Materials
Volume	5
Issue number	12
DOIs	https://doi.org/10.1002/adem.200300518
Publication status	Published - 30 Dec 2003

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