Micro-opto-electro-mechanical system for X-ray focusing

M Al-Aioubi; Philip Prewett; SE Huq; V Djakov; AG Michette

doi:10.1016/j.mee.2007.01.167

Micro-opto-electro-mechanical system for X-ray focusing

M Al-Aioubi
, Philip Prewett
, SE Huq
, V Djakov
, AG Michette

Mechanical Engineering

Research output: Contribution to journal › Article

3 Citations (Scopus)

Abstract

A MOEMS system for 1-D focusing of X-rays has been fabricated using a thermal bimorph microcantilever to produce an element with variable focal length. A passive strain gauge is incorporated for feedback control of the zoom function. The focal length dependence on bimorph temperature has been measured. (c) 2007 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	1252-1255
Number of pages	4
Journal	Microelectronic Engineering
Volume	84
Issue number	5-8
DOIs	https://doi.org/10.1016/j.mee.2007.01.167
Publication status	Published - 1 Jan 2007

Keywords

X-ray focusing
MOEMS

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10.1016/j.mee.2007.01.167

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title = "Micro-opto-electro-mechanical system for X-ray focusing",

abstract = "A MOEMS system for 1-D focusing of X-rays has been fabricated using a thermal bimorph microcantilever to produce an element with variable focal length. A passive strain gauge is incorporated for feedback control of the zoom function. The focal length dependence on bimorph temperature has been measured. (c) 2007 Elsevier B.V. All rights reserved.",

keywords = "X-ray focusing, MOEMS",

author = "M Al-Aioubi and Philip Prewett and SE Huq and V Djakov and AG Michette",

year = "2007",

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doi = "10.1016/j.mee.2007.01.167",

language = "English",

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journal = "Microelectronic Engineering",

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TY - JOUR

T1 - Micro-opto-electro-mechanical system for X-ray focusing

AU - Al-Aioubi, M

AU - Prewett, Philip

AU - Huq, SE

AU - Djakov, V

AU - Michette, AG

PY - 2007/1/1

Y1 - 2007/1/1

N2 - A MOEMS system for 1-D focusing of X-rays has been fabricated using a thermal bimorph microcantilever to produce an element with variable focal length. A passive strain gauge is incorporated for feedback control of the zoom function. The focal length dependence on bimorph temperature has been measured. (c) 2007 Elsevier B.V. All rights reserved.

AB - A MOEMS system for 1-D focusing of X-rays has been fabricated using a thermal bimorph microcantilever to produce an element with variable focal length. A passive strain gauge is incorporated for feedback control of the zoom function. The focal length dependence on bimorph temperature has been measured. (c) 2007 Elsevier B.V. All rights reserved.

KW - X-ray focusing

KW - MOEMS

U2 - 10.1016/j.mee.2007.01.167

DO - 10.1016/j.mee.2007.01.167

M3 - Article

SN - 1873-5568

VL - 84

SP - 1252

EP - 1255

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 5-8

ER -

Micro-opto-electro-mechanical system for X-ray focusing

Abstract

Keywords

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