MEMS resonator with linear drive

Carl Anthony, R Turnbull, S Collins, Michael Ward

Research output: Contribution to conference (unpublished)Paper

Original languageEnglish
Publication statusPublished - 17 Sep 2008
EventProceedings of MicroMechanics Europe Workshop -
Duration: 17 Sep 2008 → …

Conference

ConferenceProceedings of MicroMechanics Europe Workshop
Period17/09/08 → …

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