Mechanical behaviour of boron doped silicon diaphragms

Juan Ren, Michael Ward, P Kinnell, R Cradock

Research output: Contribution to conference (unpublished) › Paper

Original language	English
Publication status	Published - 17 Sept 2009
Event	20th Workshop on Micromachining, Micro Mechanics and Micro Systems (MME09) - Duration: 17 Sept 2009 → …

Conference	20th Workshop on Micromachining, Micro Mechanics and Micro Systems (MME09)
Period	17/09/09 → …

Cite this

@conference{b39cf65008a242508e76b7bba6715ee7,

title = "Mechanical behaviour of boron doped silicon diaphragms",

author = "Juan Ren and Michael Ward and P Kinnell and R Cradock",

year = "2009",

month = sep,

day = "17",

language = "English",

note = "20th Workshop on Micromachining, Micro Mechanics and Micro Systems (MME09) ; Conference date: 17-09-2009",

}