Mechanical behaviour of boron doped silicon diaphragms

Juan Ren, Michael Ward, P Kinnell, R Cradock

Research output: Contribution to conference (unpublished)Paper

Original languageEnglish
Publication statusPublished - 17 Sep 2009
Event20th Workshop on Micromachining, Micro Mechanics and Micro Systems (MME09) -
Duration: 17 Sep 2009 → …

Conference

Conference20th Workshop on Micromachining, Micro Mechanics and Micro Systems (MME09)
Period17/09/09 → …

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