Measurements of micromachined submillimeter waveguide circuits

Xiaobang Shang*, Michael J. Lancaster, Maolong Ke, Yi Wang

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

13 Citations (Scopus)


In this paper two calibrated measurement methods for submillimeter circuits are presented and micromachined waveguides operating between 220 and 325 GHz have been fabricated using thick SU-8 photoresist technology and tested. The first measurement method is achieved by employing a pair of micromachined embedded H-plane bends, which were specially designed to enable direct and accurate connection between the micromachined circuit and standard waveguide flanges. A 16 mm long WR-3 waveguide has been designed, fabricated and measured using this technology. The measured average insertion loss is 2.3 dB or 0.144 dB/mm over the frequency range of 220 - 321 GHz. The second measurement technology employs a conventionally machined metal block constructed with two separate pieces in which to mount the micromachined circuit. A choke flange has been adopted for eliminating the effect of air gap at the interfaces between the micromachined circuit and metal block. A 15 mm long WR-3 straight waveguide has been fabricated and tested. The measured insertion loss is between 1.4 dB and 3.2 dB corresponding to 0.093 and 0.213 dB/mm. A comparison between these two measurement technologies has been carried out and presented.

Original languageEnglish
Title of host publication76th ARFTG Microwave Measurement Conference
Subtitle of host publicationMillimeter-Wave Measurements and Modeling, ARFTG 2010
Publication statusPublished - 1 Dec 2010
Event76th ARFTG Microwave Measurement Conference: Millimeter-Wave Measurements and Modeling, ARFTG 2010 - Clearwater Beach, FL, United States
Duration: 30 Nov 20103 Dec 2010


Conference76th ARFTG Microwave Measurement Conference: Millimeter-Wave Measurements and Modeling, ARFTG 2010
Country/TerritoryUnited States
CityClearwater Beach, FL


  • Micromachining
  • Microwave measurement
  • Submillimeter wave devices
  • WR-3 waveguide

ASJC Scopus subject areas

  • Computer Networks and Communications


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