Master Tool Fabrication for the replication of micro and nano features

H Hirshy, G Lalev, VL Velkova, K Popov, S Scholz, Stefan Dimov

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	8th International Conference on Multi-Material Micro Manufacture, 1/01/11
Publication status	Published - 1 Jan 2011

Cite this

@inproceedings{757f86c3e57144fb81ff1ea6d2dcf04e,

title = "Master Tool Fabrication for the replication of micro and nano features",

author = "H Hirshy and G Lalev and VL Velkova and K Popov and S Scholz and Stefan Dimov",

year = "2011",

month = jan,

day = "1",

language = "English",

booktitle = "8th International Conference on Multi-Material Micro Manufacture, 1/01/11",

}