Manufacturing variation in MEMS:  Fabrication of micro array resonators

Nor Saad, C Bhaskar, Carl Anthony, Michael Ward

Research output: Contribution to conference (unpublished) › Paper

Original language	English
Publication status	Published - 17 Nov 2008
Event	Second STIMESI Workshop on MEMS and Microsystems Research and Teaching - Duration: 17 Nov 2008 → …

Conference	Second STIMESI Workshop on MEMS and Microsystems Research and Teaching
Period	17/11/08 → …

Cite this

@conference{818f5b0fe07c441fb96f93c61cde9cda,

title = "Manufacturing variation in MEMS: Fabrication of micro array resonators",

author = "Nor Saad and C Bhaskar and Carl Anthony and Michael Ward",

year = "2008",

month = nov,

day = "17",

language = "English",

note = "Second STIMESI Workshop on MEMS and Microsystems Research and Teaching ; Conference date: 17-11-2008",

}