Low voltage electron beam lithography with high sensitivity molecular fullerene resists

Francis Gibbons, Alexander Robinson, Richard Palmer, Mayandithevar Manickam, Jon Preece

Research output: Contribution to journal › Article

Cite this

@article{dd1a3624cb814095acbd1aaf6e654822,

title = "Low voltage electron beam lithography with high sensitivity molecular fullerene resists",

author = "Francis Gibbons and Alexander Robinson and Richard Palmer and Mayandithevar Manickam and Jon Preece",

year = "2005",

month = jan,

day = "1",

language = "English",

journal = "Small",

issn = "1613-6829",

publisher = "Wiley-VCH Verlag",

}