Low activation energy fullerene molecular resist

Research output: Contribution to conference (unpublished) › Paper

12 Citations (Scopus)

Original language	English
Pages	72733D-72733D-8
DOIs	https://doi.org/10.1117/12.814088
Publication status	Published - 1 Jan 2009
Event	Proceedings of SPIE: Advances in Resist Materials and Processing Technology XXVI - Duration: 1 Jan 2009 → …

Conference	Proceedings of SPIE: Advances in Resist Materials and Processing Technology XXVI
Period	1/01/09 → …

Access to Document

@conference{fe0983da55aa4a1391354a0d80be8064,

title = "Low activation energy fullerene molecular resist",

author = "J Manayam and M Manickam and Jon Preece and Richard Palmer and APG Robinson",

year = "2009",

month = jan,

day = "1",

doi = "10.1117/12.814088",

language = "English",

pages = "72733D--72733D--8",

note = "Proceedings of SPIE: Advances in Resist Materials and Processing Technology XXVI ; Conference date: 01-01-2009",

}

TY - CONF

T1 - Low activation energy fullerene molecular resist

AU - Manayam, J

AU - Manickam, M

AU - Preece, Jon

AU - Palmer, Richard

AU - Robinson, APG

PY - 2009/1/1

Y1 - 2009/1/1

U2 - 10.1117/12.814088

DO - 10.1117/12.814088

M3 - Paper

SP - 72733D-72733D-8

T2 - Proceedings of SPIE: Advances in Resist Materials and Processing Technology XXVI

Y2 - 1 January 2009

ER -