Low activation energy fullerene molecular resist

J Manayam, M Manickam, Jon Preece, Richard Palmer, APG Robinson

Research output: Contribution to conference (unpublished) › Paper

12 Citations (Scopus)

Original language	English
Pages	72733D-72733D-8
DOIs	https://doi.org/10.1117/12.814088
Publication status	Published - 1 Jan 2009
Event	Proceedings of SPIE: Advances in Resist Materials and Processing Technology XXVI - Duration: 1 Jan 2009 → …

Conference	Proceedings of SPIE: Advances in Resist Materials and Processing Technology XXVI
Period	1/01/09 → …

Access to Document

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T1 - Low activation energy fullerene molecular resist

AU - Manayam, J

AU - Manickam, M

AU - Preece, Jon

AU - Palmer, Richard

AU - Robinson, APG

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T2 - Proceedings of SPIE: Advances in Resist Materials and Processing Technology XXVI

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