LED-switchable high-Q packaged THz microbeam resonators

Stephen M. Hanham, Munir M. Ahmad, Stepan Lucyszyn, Norbert Klein

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)
229 Downloads (Pure)


This paper describes the design, fabrication, and experimental characterization of photonic crystal microbeam cavity resonators for the terahertz band implemented using suspended dielectric rectangular waveguide (DRW) in high-resistivity silicon. Electrical quality factors of up to 11 900, combined with small modal volumes of 0.28 and 0.077 mm3, are demonstrated for devices operating at 100 and 200 GHz, respectively. The devices are found to be extremely light-sensitive, opening up new opportunities for light-controlled switching devices at terahertz frequencies. It is shown that the quality factor of the resonator can be tuned and the resonance extinguished through photo-illumination with an infrared light-emitting diode (IR LED). Additionally, the questions of thermal tunability and thermal stability of the resonators are examined. The demonstrated resonators are inherently suited to integration with DRW and, by silicon bulk micromachining, represent an attractive approach for realizing microphotonic-integrated circuits for terahertz systems-on-a-substrate.

Original languageEnglish
Pages (from-to)199-208
Number of pages10
JournalIEEE Transactions on Terahertz Science and Technology
Issue number2
Early online date25 Jan 2017
Publication statusPublished - Mar 2017


  • Optical resonators
  • photonic crystals
  • photonic-integrated circuits
  • submillimeter-wave integrated circuits

ASJC Scopus subject areas

  • Radiation
  • Electrical and Electronic Engineering


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