Laser micromachining of lithium niobate based resonant sensors towards medical devices applications

Zeyad Yousif Abdoon Al-Shibaany*, Pavel Penchev, John Hedley, Stefan Dimov

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)
140 Downloads (Pure)


This paper presents a micromachining process for lithium niobate (LiNbO 3) material for the rapid prototyping of a resonant sensor design for medical devices applications. Laser micromachining was used to fabricate samples of lithium niobate material. A qualitative visual check of the surface was performed using scanning electron microscopy. The surface roughness was quantitatively investigated using an optical surface profiler. A surface roughness of 0.526 µm was achieved by laser micromachining. The performance of the laser-micromachined sensor has been examined in different working environments and different modes of operation. The sensor exhibits a Quality-factor (Q-factor) of 646 in a vacuum; and a Q-factor of 222 in air. The good match between the modelling and experimental results shows that the laser-micromachined sensor has a high potential to be used as a resonance biosensor.

Original languageEnglish
Article number2206
JournalSensors (Switzerland)
Issue number8
Publication statusPublished - 14 Apr 2020

Bibliographical note

Funding Information:
Acknowledgments: The authors wish to thank the Engineering and Physical Sciences Research Council (EPSRC) for financial support for this work (EP/K031953/1, EP/L001268/1, and EP/M020657/1). Zeyad Al-Shibaany acknowledges the Higher Committee for Education Development (HCED) in Iraq for the award of the academic excellence scholarship.

Funding Information:
Funding: This research was funded by the Engineering and Physical Sciences Research Council (EPSRC) grants number (EP/K031953/1, EP/L001268/1, and EP/M020657/1).

Publisher Copyright:
© 2020 by the authors. Licensee MDPI, Basel, Switzerland.


  • Biosensors
  • Laser micromachining
  • Lithium niobate
  • Medical devices
  • Sensors

ASJC Scopus subject areas

  • Analytical Chemistry
  • Biochemistry
  • Atomic and Molecular Physics, and Optics
  • Instrumentation
  • Electrical and Electronic Engineering


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