This paper presents a micromachining process for lithium niobate (LiNbO 3) material for the rapid prototyping of a resonant sensor design for medical devices applications. Laser micromachining was used to fabricate samples of lithium niobate material. A qualitative visual check of the surface was performed using scanning electron microscopy. The surface roughness was quantitatively investigated using an optical surface profiler. A surface roughness of 0.526 µm was achieved by laser micromachining. The performance of the laser-micromachined sensor has been examined in different working environments and different modes of operation. The sensor exhibits a Quality-factor (Q-factor) of 646 in a vacuum; and a Q-factor of 222 in air. The good match between the modelling and experimental results shows that the laser-micromachined sensor has a high potential to be used as a resonance biosensor.
Bibliographical noteFunding Information:
Acknowledgments: The authors wish to thank the Engineering and Physical Sciences Research Council (EPSRC) for financial support for this work (EP/K031953/1, EP/L001268/1, and EP/M020657/1). Zeyad Al-Shibaany acknowledges the Higher Committee for Education Development (HCED) in Iraq for the award of the academic excellence scholarship.
Funding: This research was funded by the Engineering and Physical Sciences Research Council (EPSRC) grants number (EP/K031953/1, EP/L001268/1, and EP/M020657/1).
© 2020 by the authors. Licensee MDPI, Basel, Switzerland.
- Laser micromachining
- Lithium niobate
- Medical devices
ASJC Scopus subject areas
- Analytical Chemistry
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering