Laser micromachining of lithium niobate based resonant sensors towards medical devices applications

Zeyad Al-Shibaany, Pavel Penchev, John Hedley, Stefan Dimov

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)
95 Downloads (Pure)


This paper presents a micromachining process for lithium niobate (LiNbO 3) material for the rapid prototyping of a resonant sensor design for medical devices applications. Laser micromachining was used to fabricate samples of lithium niobate material. A qualitative visual check of the surface was performed using scanning electron microscopy. The surface roughness was quantitatively investigated using an optical surface profiler. A surface roughness of 0.526 µm was achieved by laser micromachining. The performance of the laser-micromachined sensor has been examined in different working environments and different modes of operation. The sensor exhibits a Quality-factor (Q-factor) of 646 in a vacuum; and a Q-factor of 222 in air. The good match between the modelling and experimental results shows that the laser-micromachined sensor has a high potential to be used as a resonance biosensor.

Original languageEnglish
Article number2206
JournalSensors (Switzerland)
Issue number8
Publication statusPublished - 14 Apr 2020


  • Biosensors
  • Laser micromachining
  • Lithium niobate
  • Medical devices
  • Sensors

ASJC Scopus subject areas

  • Analytical Chemistry
  • Biochemistry
  • Atomic and Molecular Physics, and Optics
  • Instrumentation
  • Electrical and Electronic Engineering


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