Laser micromachining of lithium niobate based resonant sensors towards medical devices applications

Zeyad Yousif Abdoon Al-Shibaany; Pavel Penchev; John Hedley; Stefan Dimov

doi:10.3390/s20082206

Laser micromachining of lithium niobate based resonant sensors towards medical devices applications

Zeyad Yousif Abdoon Al-Shibaany^*, Pavel Penchev, John Hedley, Stefan Dimov

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

176 Downloads (Pure)

Abstract

This paper presents a micromachining process for lithium niobate (LiNbO ₃) material for the rapid prototyping of a resonant sensor design for medical devices applications. Laser micromachining was used to fabricate samples of lithium niobate material. A qualitative visual check of the surface was performed using scanning electron microscopy. The surface roughness was quantitatively investigated using an optical surface profiler. A surface roughness of 0.526 µm was achieved by laser micromachining. The performance of the laser-micromachined sensor has been examined in different working environments and different modes of operation. The sensor exhibits a Quality-factor (Q-factor) of 646 in a vacuum; and a Q-factor of 222 in air. The good match between the modelling and experimental results shows that the laser-micromachined sensor has a high potential to be used as a resonance biosensor.

Original language	English
Article number	2206
Journal	Sensors (Switzerland)
Volume	20
Issue number	8
DOIs	https://doi.org/10.3390/s20082206 https://doi.org/10.3390/s20082206 https://doi.org/10.3390/s20082206
Publication status	Published - 14 Apr 2020

Bibliographical note

Funding Information:
Acknowledgments: The authors wish to thank the Engineering and Physical Sciences Research Council (EPSRC) for financial support for this work (EP/K031953/1, EP/L001268/1, and EP/M020657/1). Zeyad Al-Shibaany acknowledges the Higher Committee for Education Development (HCED) in Iraq for the award of the academic excellence scholarship.

Funding Information:
Funding: This research was funded by the Engineering and Physical Sciences Research Council (EPSRC) grants number (EP/K031953/1, EP/L001268/1, and EP/M020657/1).

Publisher Copyright:
© 2020 by the authors. Licensee MDPI, Basel, Switzerland.

Keywords

Biosensors
Laser micromachining
Lithium niobate
Medical devices
Sensors

ASJC Scopus subject areas

Analytical Chemistry
Biochemistry
Atomic and Molecular Physics, and Optics
Instrumentation
Electrical and Electronic Engineering

Access to Document

Al-Shibaany_et_al_Laser_micromachining_of_lithium_niobite_Sensors_2020Final published version, 6.62 MBLicence: Creative Commons: Attribution (CC BY)

https://www.mdpi.com/1424-8220/20/8/2206Licence: Creative Commons: Attribution (CC BY)

Cite this

@article{8747d2b836e249188ffb0aefb636ca49,

title = "Laser micromachining of lithium niobate based resonant sensors towards medical devices applications",

abstract = "This paper presents a micromachining process for lithium niobate (LiNbO 3) material for the rapid prototyping of a resonant sensor design for medical devices applications. Laser micromachining was used to fabricate samples of lithium niobate material. A qualitative visual check of the surface was performed using scanning electron microscopy. The surface roughness was quantitatively investigated using an optical surface profiler. A surface roughness of 0.526 µm was achieved by laser micromachining. The performance of the laser-micromachined sensor has been examined in different working environments and different modes of operation. The sensor exhibits a Quality-factor (Q-factor) of 646 in a vacuum; and a Q-factor of 222 in air. The good match between the modelling and experimental results shows that the laser-micromachined sensor has a high potential to be used as a resonance biosensor. ",

keywords = "Biosensors, Laser micromachining, Lithium niobate, Medical devices, Sensors",

author = "Al-Shibaany, {Zeyad Yousif Abdoon} and Pavel Penchev and John Hedley and Stefan Dimov",

note = "Funding Information: Acknowledgments: The authors wish to thank the Engineering and Physical Sciences Research Council (EPSRC) for financial support for this work (EP/K031953/1, EP/L001268/1, and EP/M020657/1). Zeyad Al-Shibaany acknowledges the Higher Committee for Education Development (HCED) in Iraq for the award of the academic excellence scholarship. Funding Information: Funding: This research was funded by the Engineering and Physical Sciences Research Council (EPSRC) grants number (EP/K031953/1, EP/L001268/1, and EP/M020657/1). Publisher Copyright: {\textcopyright} 2020 by the authors. Licensee MDPI, Basel, Switzerland.",

year = "2020",

month = apr,

day = "14",

doi = "10.3390/s20082206",

language = "English",

volume = "20",

journal = "Sensors (Switzerland)",

issn = "1424-8220",

publisher = "MDPI",

number = "8",

}

TY - JOUR

T1 - Laser micromachining of lithium niobate based resonant sensors towards medical devices applications

AU - Al-Shibaany, Zeyad Yousif Abdoon

AU - Penchev, Pavel

AU - Hedley, John

AU - Dimov, Stefan

N1 - Funding Information: Acknowledgments: The authors wish to thank the Engineering and Physical Sciences Research Council (EPSRC) for financial support for this work (EP/K031953/1, EP/L001268/1, and EP/M020657/1). Zeyad Al-Shibaany acknowledges the Higher Committee for Education Development (HCED) in Iraq for the award of the academic excellence scholarship. Funding Information: Funding: This research was funded by the Engineering and Physical Sciences Research Council (EPSRC) grants number (EP/K031953/1, EP/L001268/1, and EP/M020657/1). Publisher Copyright: © 2020 by the authors. Licensee MDPI, Basel, Switzerland.

PY - 2020/4/14

Y1 - 2020/4/14

N2 - This paper presents a micromachining process for lithium niobate (LiNbO 3) material for the rapid prototyping of a resonant sensor design for medical devices applications. Laser micromachining was used to fabricate samples of lithium niobate material. A qualitative visual check of the surface was performed using scanning electron microscopy. The surface roughness was quantitatively investigated using an optical surface profiler. A surface roughness of 0.526 µm was achieved by laser micromachining. The performance of the laser-micromachined sensor has been examined in different working environments and different modes of operation. The sensor exhibits a Quality-factor (Q-factor) of 646 in a vacuum; and a Q-factor of 222 in air. The good match between the modelling and experimental results shows that the laser-micromachined sensor has a high potential to be used as a resonance biosensor.

AB - This paper presents a micromachining process for lithium niobate (LiNbO 3) material for the rapid prototyping of a resonant sensor design for medical devices applications. Laser micromachining was used to fabricate samples of lithium niobate material. A qualitative visual check of the surface was performed using scanning electron microscopy. The surface roughness was quantitatively investigated using an optical surface profiler. A surface roughness of 0.526 µm was achieved by laser micromachining. The performance of the laser-micromachined sensor has been examined in different working environments and different modes of operation. The sensor exhibits a Quality-factor (Q-factor) of 646 in a vacuum; and a Q-factor of 222 in air. The good match between the modelling and experimental results shows that the laser-micromachined sensor has a high potential to be used as a resonance biosensor.

KW - Biosensors

KW - Laser micromachining

KW - Lithium niobate

KW - Medical devices

KW - Sensors

UR - http://www.scopus.com/inward/record.url?scp=85083477783&partnerID=8YFLogxK

U2 - 10.3390/s20082206

DO - 10.3390/s20082206

M3 - Article

C2 - 32295102

AN - SCOPUS:85083477783

SN - 1424-8220

VL - 20

JO - Sensors (Switzerland)

JF - Sensors (Switzerland)

IS - 8

M1 - 2206

ER -

Laser micromachining of lithium niobate based resonant sensors towards medical devices applications

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

Access to Document

Fingerprint

Cite this