Laser etching processes: Towards sub-picosecond X-UV irradiation

Damien Riedel, LH Pozos, S Baggott, Kurt Kolasinski, Richard Palmer

Research output: Contribution to conference (unpublished) › Paper

Original language	English
DOIs	https://doi.org/10.1051/jp4:2001296
Publication status	Published - 1 Jun 2000
Event	7th International Conference on X-Ray Lasers, Jun 19-23, 2000. ST MALO, France - Duration: 1 Jul 2001 → …

Conference	7th International Conference on X-Ray Lasers, Jun 19-23, 2000. ST MALO, France
Period	1/07/01 → …

Access to Document

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title = "Laser etching processes: Towards sub-picosecond X-UV irradiation",

author = "Damien Riedel and LH Pozos and S Baggott and Kurt Kolasinski and Richard Palmer",

year = "2000",

month = jun,

day = "1",

doi = "10.1051/jp4:2001296",

language = "English",

note = "7th International Conference on X-Ray Lasers, Jun 19-23, 2000. ST MALO, France ; Conference date: 01-07-2001",

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TY - CONF

T1 - Laser etching processes: Towards sub-picosecond X-UV irradiation

AU - Riedel, Damien

AU - Pozos, LH

AU - Baggott, S

AU - Kolasinski, Kurt

AU - Palmer, Richard

PY - 2000/6/1

Y1 - 2000/6/1

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DO - 10.1051/jp4:2001296

M3 - Paper

T2 - 7th International Conference on X-Ray Lasers, Jun 19-23, 2000. ST MALO, France

Y2 - 1 July 2001

ER -