Interdependence between stress, preferred orientation, and surface morphology of nanocrystalline TiN thin films deposited by dual ion beam sputtering

G Abadias, Yau Tse, PH Guerin, V Pelosin

Research output: Contribution to journalArticle

109 Citations (Scopus)
Original languageEnglish
Pages (from-to)113519-1-13
JournalJournal of Applied Physics
Issue number11
Publication statusPublished - 1 Jan 2006

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