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Impact of manufacturing variation on the performance of coupled micro resonator array for mass detection sensor

Research output: Contribution to conference (unpublished)Paper

6 Citations (Scopus)
Original languageEnglish
Pages831-834
Number of pages4
DOIs
Publication statusPublished - 17 Sept 2009
EventProcedia Chemistry -
Duration: 17 Sept 2009 → …

Conference

ConferenceProcedia Chemistry
Period17/09/09 → …

Keywords

  • constant coupled resonators
  • FEA and lumped mass analysis
  • mass sensor
  • variation quantification
  • Manufacturing variation

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