Highly substituted fullerene-based spin-on organic hardmasks
- Alan G. Brown
- , Guy Dawson
- , Greg O'Callaghan
- , Carmen Popescu
- , Alexandra McClelland
- , Tom Lada
- , Bryan Schofield
- , Warren Montgomery
- , Alex P.G. Robinson*
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution