Highly flexible SU-8 microstructures

Research output: Contribution to conference (unpublished) › Paper

Original language	English
Pages	U298-U299
Publication status	Published - 1 Jan 2007
Event	Transducers '07 & Eurosensors Xxi, Digest of Technical Papers, Vols 1 and 2 - Duration: 1 Jan 2007 → …

Conference	Transducers '07 & Eurosensors Xxi, Digest of Technical Papers, Vols 1 and 2
Period	1/01/07 → …

Keywords

@conference{269090c5e33d4eaea551f96f9c5a403a,

title = "Highly flexible SU-8 microstructures",

keywords = "SU-8, device characterisation, material properties",

author = "JPF Spratley and Michael Ward and Peter Hall",

year = "2007",

month = jan,

day = "1",

language = "English",

pages = "U298--U299",

note = "Transducers '07 \& Eurosensors Xxi, Digest of Technical Papers, Vols 1 and 2 ; Conference date: 01-01-2007",

}