Original language | English |
---|---|
Pages | U298-U299 |
Publication status | Published - 1 Jan 2007 |
Event | Transducers '07 & Eurosensors Xxi, Digest of Technical Papers, Vols 1 and 2 - Duration: 1 Jan 2007 → … |
Conference
Conference | Transducers '07 & Eurosensors Xxi, Digest of Technical Papers, Vols 1 and 2 |
---|---|
Period | 1/01/07 → … |
Keywords
- SU-8
- device characterisation
- material properties