Superconducting thin films of Nd1-xYxBa2Cu3O7-δ (x = 0.053, 0.106 and 0.159) have been grown on single crystal SrTiO3 substrates by pulsed laser deposition. The orientation of the films was investigated by x-ray diffraction. The surface morphology of the films was examined by atomic force microscopy and scanning tunnelling microscopy. Qualitative and quantitative elemental analyses of the films were carried out by using electron probe microanalysis. Micro-Raman spectroscopy was used to study the oxygen sublattice vibrations of the films. The effects of annealing were also investigated after patterning device structures in the films.