Ar+ ion beam sputtering/mixing deposition was used to produce thin calcium phosphate coatings on titanium substrate from hydroxyl-poly-calcium sodium phosphate (HPPA) and HPPA + Ti targets. Three types of coatings (one type of monolayer coating and two types of functionally graded coating) were manufactured. It was found that as-sputtered coatings were amorphous. No distinct hydroxyl band was observed in the FTIR spectra, but new absorption bands were determined for CO3(2-), which resulted during the deposition process. Compositional gradients from the surface to the interior (i.e. adjacent to the substrate) were achieved for the functionally graded coatings. Post-deposition heat treatment indicated that the bonding strength between the coating and the substrate was improved by the use of functionally graded structures.