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Fullerenes
Alex Robinson
(Inventor)
, Richard Palmer (Inventor)
, Andreas Frommhold (Inventor)
, Dongxu Yang (Inventor)
Chemical Engineering
Physics and Astronomy
Research output
:
Patent
Overview
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Keyphrases
Extreme Ultraviolet
100%
Fullerene
100%
Charged Particles
50%
Photoresist
50%
Electron Beam
50%
X-ray
50%
Pattern Processing
50%
Fullerene Derivatives
50%
Negative Photoresist
50%
Fine Pattern
50%
Positive Photoresist
50%
Physics
Extreme Ultraviolet Radiation
100%
Fullerene
50%
Ultraviolet Radiation
50%
Charged Particle
50%
X Ray
50%
Electron Beam
50%
Material Science
Fullerene
100%