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Friction-induced hillocks on monocrystalline silicon in atmosphere and in vacuum
B Yu, L Qian,
Hanshan Dong
, J Yu, Z Zhou
Metallurgy and Materials
Research output
:
Contribution to journal
›
Article
33
Citations (Scopus)
Overview
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Dive into the research topics of 'Friction-induced hillocks on monocrystalline silicon in atmosphere and in vacuum'. Together they form a unique fingerprint.
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Keyphrases
Monocrystalline Silicon
100%
Hillocks
100%
Friction-induced
100%
Mechanical Interaction
25%
Further Analysis
12%
TEM Observation
12%
Surface Analysis
12%
Shear Deformation
12%
Vacuum Condition
12%
Si(111)
12%
Oxidation Reaction
12%
High Mass Loading
12%
Dominant Role
12%
Atomic Force Microscope
12%
Atmospheric Conditions
12%
Superficial Layer
12%
Oxidation Layer
12%
Nanowear
12%
Wear Failure
12%
Total Height
12%
Engineering
Mechanical Interaction
100%
Monocrystalline Silicon
100%
Shear Deformation
50%
Microelectromechanical System
50%
Atomic Force Microscope
50%
Material Science
Silicon
100%
Surface (Surface Science)
50%
Surface Analysis
50%
Microelectromechanical System
50%