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Formation of nanoscale structures by inductively coupled plasma etching
Colin C. Welch, Deirdre L. Olynick, Zuwei Liu, Anders Holmberg, Christophe Peroz, Alex P.G. Robinson, M. David Henry, Axel Scherer, Thomas Mollenhauer, Vince Genova, Doris K.T. Ng
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution