Flexible SU-8 microstructures for neural implant design

JPF Spratley; Michael Ward; Peter Hall; Clive Thursfield

doi:10.1016/j.sna.2007.10.052

Flexible SU-8 microstructures for neural implant design

JPF Spratley, Michael Ward, Peter Hall, Clive Thursfield

Research output: Contribution to journal › Article

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Abstract

This work investigates the use of SU-8 microstructures for applications within flexible neural implants. Six different microstructures are fabricated and tested in both tension and bending to determine their Young's modulus and their failure stress when deformed about a small radius of curvature. A numerical model is presented that accurately predicts the performance of the structures under bending, and physical testing shows that stresses of up to 300 MPa are achievable. (c) 2007 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	324-331
Number of pages	8
Journal	Sensors and Actuators A: Physical
Volume	147
Issue number	1
DOIs	https://doi.org/10.1016/j.sna.2007.10.052
Publication status	Published - 1 Sept 2008

Keywords

materials testing
SU-8
MEMS

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10.1016/j.sna.2007.10.052

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title = "Flexible SU-8 microstructures for neural implant design",

abstract = "This work investigates the use of SU-8 microstructures for applications within flexible neural implants. Six different microstructures are fabricated and tested in both tension and bending to determine their Young's modulus and their failure stress when deformed about a small radius of curvature. A numerical model is presented that accurately predicts the performance of the structures under bending, and physical testing shows that stresses of up to 300 MPa are achievable. (c) 2007 Elsevier B.V. All rights reserved.",

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AU - Thursfield, Clive

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AB - This work investigates the use of SU-8 microstructures for applications within flexible neural implants. Six different microstructures are fabricated and tested in both tension and bending to determine their Young's modulus and their failure stress when deformed about a small radius of curvature. A numerical model is presented that accurately predicts the performance of the structures under bending, and physical testing shows that stresses of up to 300 MPa are achievable. (c) 2007 Elsevier B.V. All rights reserved.

KW - materials testing

KW - SU-8

KW - MEMS

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DO - 10.1016/j.sna.2007.10.052

M3 - Article

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JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

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Flexible SU-8 microstructures for neural implant design

Abstract

Keywords

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