Finite element modelling for mechanical behaviour of silicon diaphragms using comsol multiphysics

Juan Ren, Michael Ward, P Kinnell, R Cradock

Research output: Contribution to conference (unpublished) › Paper

Original language	English
Publication status	Published - 17 Oct 2009
Event	COMSOL Conference 2009 - Duration: 17 Oct 2009 → …

Conference	COMSOL Conference 2009
Period	17/10/09 → …

Cite this

@conference{97359e1484db424d8532b9b2a14abcf1,

title = "Finite element modelling for mechanical behaviour of silicon diaphragms using comsol multiphysics",

author = "Juan Ren and Michael Ward and P Kinnell and R Cradock",

year = "2009",

month = oct,

day = "17",

language = "English",

note = "COMSOL Conference 2009 ; Conference date: 17-10-2009",

}