FIB sputtering optimization using ion reverse software

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Microelectronic Engineering
Publication status	Published - 1 Jan 2009

Cite this

@article{43d709b5113b4a80b774e72945b9c405,

title = "FIB sputtering optimization using ion reverse software",

author = "S Zaitzev and A Svintsov and G Lalev and Stefan Dimov and V Valkova and H Hirshy",

year = "2009",

month = jan,

day = "1",

language = "English",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}