FIB direct write of ALD A1203 mask for silicon DRIE

Carl Anthony, J Bowen, RL Puurunen, J Dekker, Philip Prewett, Michael Ward, Jason Teng, Emma Carter

Research output: Contribution to conference (unpublished) › Paper

Original language	English
Publication status	Published - 10 Sept 2008
Event	Proceedings of 22nd Internation Conference EUROSENSORS - Duration: 10 Sept 2008 → …

Conference	Proceedings of 22nd Internation Conference EUROSENSORS
Period	10/09/08 → …

Cite this

@conference{458946b1c1df4fe2a4675d62caf18852,

title = "FIB direct write of ALD A1203 mask for silicon DRIE",

author = "Carl Anthony and J Bowen and RL Puurunen and J Dekker and Philip Prewett and Michael Ward and Jason Teng and Emma Carter",

year = "2008",

month = sep,

day = "10",

language = "English",

note = "Proceedings of 22nd Internation Conference EUROSENSORS ; Conference date: 10-09-2008",

}