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Fabrication of thick electroforming micro mould using a KMPR negative tone photoresist
CH Lee,
Kyle Jiang
Mechanical Engineering
Research output
:
Contribution to journal
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Article
39
Citations (Scopus)
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Dive into the research topics of 'Fabrication of thick electroforming micro mould using a KMPR negative tone photoresist'. Together they form a unique fingerprint.
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Keyphrases
Micro Mold
100%
Electroforming
100%
Negative Photoresist
100%
SU-8
80%
Microforming
60%
Aspect Ratio
20%
Commercially Available
20%
Sidewall
20%
Thick Resist
20%
SU-8 Resist
20%
Microfabrication
20%
Metal Components
20%
Lithography Process
20%
Remover
20%
Thickness Ratio
20%
Double Spin
20%
Verticality
20%
Dimensional Accuracy
20%
Confined Area
20%
Metal Structure
20%
Mask Aligner
20%
Engineering
Photoresist
100%
Electroforming
100%
Aspect Ratio
20%
Side Wall
20%
Lithography
20%
Microfabrication
20%
Component Metal
20%
Thickness Ratio
20%
Confined Area
20%
Dimensional Accuracy
20%
Material Science
Lithography
100%
Microfabrication
100%