Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers

Anja Wellner, Paul Preece, JC Fowler, Richard Palmer

Research output: Contribution to conference (unpublished) › Paper

Original language	English
Publication status	Published - 1 Sept 2001
Event	26th International Conference on Micro- and Nano-Engineering, Sep 18-21, 2000. JENA, Germany - Duration: 1 Sept 2001 → …

Conference	26th International Conference on Micro- and Nano-Engineering, Sep 18-21, 2000. JENA, Germany
Period	1/09/01 → …

Keywords

@conference{74b46900deae4d8292fcf5f8d6962954,

title = "Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers",

keywords = "silicon nanopillars, fabrication, natural lithography, nanostructures",

author = "Anja Wellner and Paul Preece and JC Fowler and Richard Palmer",

year = "2001",

month = sep,

day = "1",

language = "English",

note = "26th International Conference on Micro- and Nano-Engineering, Sep 18-21, 2000. JENA, Germany ; Conference date: 01-09-2001",

}

TY - CONF

T1 - Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers

AU - Wellner, Anja

AU - Preece, Paul

AU - Fowler, JC

AU - Palmer, Richard

PY - 2001/9/1

Y1 - 2001/9/1

KW - silicon nanopillars

KW - fabrication

KW - natural lithography

KW - nanostructures

M3 - Paper

T2 - 26th International Conference on Micro- and Nano-Engineering, Sep 18-21, 2000. JENA, Germany

Y2 - 1 September 2001

ER -