Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers

Anja Wellner, Paul Preece, JC Fowler, Richard Palmer

Research output: Contribution to conference (unpublished)Paper

Original languageEnglish
Publication statusPublished - 1 Sep 2001
Event26th International Conference on Micro- and Nano-Engineering, Sep 18-21, 2000. JENA, Germany -
Duration: 1 Sep 2001 → …

Conference

Conference26th International Conference on Micro- and Nano-Engineering, Sep 18-21, 2000. JENA, Germany
Period1/09/01 → …

Keywords

  • silicon nanopillars
  • fabrication
  • natural lithography
  • nanostructures

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