Abstract
Ordered arrays of InP microstructures have been fabricated on InP(001) substrates by wet chemical etching in aqueous HCl with patterned Au masks. The masks were produced by Au deposition through copper grids or a monolayer of polystyrene microspheres. Square InP mesas (20 x 20 mum) and pillars (similar to100 nm in both diameter and height) were both produced and characterized by scanning electron microscopy and atomic force microscopy.
| Original language | English |
|---|---|
| Pages (from-to) | 627-630 |
| Number of pages | 4 |
| Journal | Journal of Nanoscience and Nanotechnology |
| Volume | 2 |
| DOIs | |
| Publication status | Published - 1 Dec 2002 |
Keywords
- wet chemical etching
- lithography
- self-organization
- microfabrication
- InP