Abstract
The design, fabrication and preliminary testing of a vertical nanodevice comprising an active region of gold colloidal nanoparticles deposited within a silicon nanopillar architecture is presented. Each step of the fabrication is a parallel process, starting with the production of an array of silicon pillars using natural lithographic techniques. Electrical measurements through a small array of these pillars show linear behaviour in the current-voltage curves, which lead to a pillar resistance value fully commensurate with the known geometry. The results in this paper show the fabrication at each stage, and when combined with characterisation data represent a demonstration of the 'proof of principle' of our approach. (C) 2004 Published by Elsevier B.V.
Original language | English |
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Pages (from-to) | 542-546 |
Number of pages | 5 |
Journal | Microelectronic Engineering |
Volume | 73-74 |
DOIs | |
Publication status | Published - 1 Jun 2004 |
Keywords
- silicon nanopillar
- natural lithography
- vertical nanodevice
- gold colloidal nanoparticles