Fabrication of complex 3D structures using Step and Flash Imprint Lithography (S-FIL)

J Kettle, RT Hoyle, Stefan Dimov, RM Perks

Research output: Contribution to journal › Article

12 Citations (Scopus)

Original language	English
Pages (from-to)	853-855
Number of pages	3
Journal	Microelectronic Engineering
Volume	85
Issue number	5-6
Publication status	Published - 1 Jan 2008

Cite this

@article{38d04aba0a1345ae8128503add466c5e,

title = "Fabrication of complex 3D structures using Step and Flash Imprint Lithography (S-FIL)",

author = "J Kettle and RT Hoyle and Stefan Dimov and RM Perks",

year = "2008",

month = jan,

day = "1",

language = "English",

volume = "85",

pages = "853--855",

journal = "Microelectronic Engineering",

issn = "1873-5568",

publisher = "Elsevier",

number = "5-6",

}